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Ali Salimian, Arjang Aminishahsavarani and Hari Upadhyaya
We implemented deep learning models to examine the accuracy of predicting a single feature (sheet resistance) of thin films of indium-doped zinc oxide deposited via plasma sputter deposition by feeding the spectral data of the plasma to the deep learning...
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Aladin Eko Purkuncoro,Rudy Soenoko,Dionysius Joseph Djoko Herry Santjojo,Yudy Surya Irawan
Pág. 24 - 29
Battery waste is one of waste that can damage the environment and there has not been much good processing in Indonesia. Even though, battery waste contains carbon which can be used as a target material for deposition of carbon films using plasma sputteri...
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Qi Hao, Xiuhua Fu, Shigeng Song, Des Gibson, Cheng Li, Hin On Chu and Yongjing Shi
TiO2 deposition using separate regions for sputtering and oxidation is not well investigated. We optimized process parameter for such as oxygen flow and microwave power to produce high quality TiO2 filters for Stereo/3D imaging applications. This deposit...
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Kuo-Yung Hung, Hong-Chen Lai and Hui-Ping Feng
Hydroxyapatite (HA) coatings on titanium have been investigated for many years, and have demonstrated advantageous biocompatibility in dental implants. Animal experiments have demonstrated that the biological response to plasma-sprayed HA-coated implants...
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Kuo-Yung Hung, Hong-Chen Lai, Yung-Chin Yang and Hui-Ping Feng
Radio frequency (RF) sputtering is a potential medical device coating technology that is commercializable; however, a suitable commercialized target for sputtering the hydroxyapatite (HA) coating onto titanium medical devices is more important. Therefore...
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Ali Salimian, Evan Haine, Cova Pardo-Sanchez, Abul Hasnath and Hari Upadhyaya
The spectral emission data from the plasma glow of various sputtering targets containing indium oxide, zinc oxide, and tin oxide were obtained. The plasma was generated at various power and chamber pressures. These spectral data were then converted into ...
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Rafal Chodun, Bartosz Wicher, Katarzyna Nowakowska-Langier, Roman Minikayev, Marlena Dypa-Uminska and Krzysztof Zdunek
This paper presents the experimental results of high-temperature sputtering of nickel targets by the Gas Injection Magnetron Sputtering (GIMS) technique. The GIMS technique is a pulsed magnetron sputtering technique that involves the generation of plasma...
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Soyoung Kim, Jung-Hwan In, Seon Hoon Kim, Karam Han, Dongkook Lim, Yun Sik Hwang, Kyung Min Lee and Ju Hyeon Choi
SiO2/Nb2O5 multilayer thin films were designed for the special application of an aviation lighting system emitting green light. For optical components in this system to meet requirements such as a high transmittance and durability, SiO2/Nb2O5 multilayer ...
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Holger Schwarz, Thomas Uhlig, Thomas Lindner, Thomas Lampke, Guntram Wagner and Thomas Seyller
We demonstrate the systematic hardness enhancement of the CoCrFeNi high-entropy alloy (HEA) by the addition of tungsten carbide (WC). Mixed thin films are fabricated by magnetron co-sputtering using a home-made spark plasma-sintered CoCrFeNi target and a...
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Stephen T. Hsieh, Himanshu Mishra, Nima Bolouki, Weite Wu, Chuan Li and Jang-Hsing Hsieh
A plasma system attached with one internal coil (for generating inductively coupled plasma) and two sputtering carbon targets was set up to deposit PP-MMA (plasma polymerized methyl methacrylate) thin films. PP-MMA was used as a model material in the pre...
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Andreea Groza, Dragana B. Dreghici and Mihai Ganciu
Calcium phosphate coatings were deposited on thermally sensitive polyprophylene substrates in radio frequency (rf) magnetron sputtering discharge. The steady state of the deposition plasma and its components were identified by deposition rate measurement...
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Wei Gao, Yujing Li, Yuyuan Zhang and Hong Yin
Cubic boron nitride (c-BN) films were prepared via radio frequency (RF) magnetron sputtering from a hexagonal boron nitride (h-BN) target in a pure N2 plasma. The composition and microstructure morphology of the BN films with different deposition times u...
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Musab Timan Idriss Gasab, Hiroyuki Sugawara, Takemi Sato and Hiroshi Fujiyama
The double-ended coaxial magnetron pulsed plasma (DCMPP) method with auxiliary outer anode was introduced in order to achieve the uniform coating of non-conductive thin films on the inner walls of insulator tubes. In this study, titanium (Ti) was employe...
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Pietro Mandracci, Federico Mussano, Paola Rivolo and Stefano Carossa
Surface modification of dental implants is a key process in the production of these medical devices, and especially titanium implants used in the dental practice are commonly subjected to surface modification processes before their clinical use. A wide r...
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Shang-Chou Chang, Jhih-Ciang Hu, Huang-Tian Chan and Chuan-An Hsiao
Low-emissivity glass has high transmission in the visible region and high reflectivity in the infrared region. Gallium and aluminum codoped zinc oxide (GAZO) processed by hydrogen (H2) plasma treatment holds promise for fabricating good low-emissivity gl...
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Donglin Ma, Qiaoyuan Deng, Huaiyuan Liu and Yongxiang Leng
Titanium nitride (Ti-N) thin films are electrically and thermally conductive and have high hardness and corrosion resistance. Dense and defect-free Ti-N thin films have been widely used in the surface modification of cutting tools, wear resistance compon...
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Arutiun Ehiasarian, Yashodhan Purandare, Arunprabhu Sugumaran, Papken Hovsepian, Peter Hatto and Jeroen De Backer
The Stationary Shoulder Friction Stir Welding (SS-FSW) technique benefits from reduced heat input, improved mechanical properties and surface finish of the weld, avoiding the need for post weld processing. Coatings on the tool probe and the shoulder for ...
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Sergey Grigoriev, Alexander Metel, Marina Volosova and Yury Melnik
A new hollow cathode sputtering system is used for beam-assisted deposition of thin films on dielectric substrates. A copper target placed at the hollow cathode bottom is uniformly sputtered by argon ions from the glow discharge plasma filling the cathod...
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Guobiao Cai, Lihui Liu, Bijiao He, Guilong Ling, Huiyan Weng and Weizong Wang
Chemical and electrical thrusters are generally utilized to control the attitude and orbit of spacecraft in aerospace. When they are firing, the exhaust expands into the vacuum environment, known as the vacuum plume. The plume flow can collide with space...
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Ke Zhao, Hongyan Wu, Changle Xiao, Jieyang Dong, Junzhao Ren and Zhaoxiang Peng
In order to improve the corrosion resistance of implant materials and understand the corrosion mechanisms, we prepared a biomedical Nb-Zr alloying layer on 316L stainless steel using double-layer glow plasma surface-alloying technology and investigated t...
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