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Jianrong Xiao, Chenyang Gong, Meng Qi, Aihua Jiang, Zhiyong Wang, Ming Li and Jiafeng Ma
Deposition techniques of direct current and radio-frequency magnetron sputtering were used to separately prepare TiN/C microstructural composite layer and fluorinated diamond-like carbon (FDLC) film on monocrystalline silicon. The aim was to investigate ...
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