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Tao Wang, Yifan Wang, Qi Cheng, Shouming Yu and Guojun Zhang
CrNx coatings with a low nitrogen content below 31.7 at.% were deposited using closed field unbalanced magnetron sputtering by varying the N2:Ar flow ratio. A dense and column-free CrNx coating was obtained at a nitrogen content of 14.8 at.%, whereas the...
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