|
|
|
|
|
Ali Salimian, Evan Haine, Cova Pardo-Sanchez, Abul Hasnath and Hari Upadhyaya
The spectral emission data from the plasma glow of various sputtering targets containing indium oxide, zinc oxide, and tin oxide were obtained. The plasma was generated at various power and chamber pressures. These spectral data were then converted into ...
ver más
|
|
|
|
|