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Po-Chou Chen, Shu-Mei Chang, Hao-Chung Kuo, Fu-Cheng Chang, Yu-An Li and Chao-Cheng Ting
In this research, a 14 nm high-performance computing application-specific integrated circuit was coated with a 5?20 nm Al2O3 thin film by atomic layer deposition in room-temperature conditions to study its performance in terms of reliability with differe...
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